In-Situ Shearing Interferometry Of National Synchrotron Light Source Mirrors

Shi-nan Qian; Harvey Rarback; Deming Shu; Peter Z. Takacs

doi:10.1117/12.939838

20 April 1987 In-Situ Shearing Interferometry Of National Synchrotron Light Source Mirrors

Shi-nan Qian, Harvey Rarback, Deming Shu, Peter Z. Takacs

Proceedings Volume 0749, Metrology: Figure and Finish; (1987) https://doi.org/10.1117/12.939838
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States

Abstract

In situ mirror distortion measurements were made with a lateral shearing interferometer on three mirrors in beam line X17T at the National Synchrotron Light Source. Lateral shearing interference is insensitive to vibrational motion in five of the six degrees of freedom, so it is well-suited for investigations in the synchrotron radiation (SR) environment. No distortion was seen in an uncooled silicon carbide mirror and in a cooled copper alloy mirror on X17TB, but a change in the radius of an uncooled electroless nickel-plated aluminum cylinder mirror of about 6.2% was observed on X17TA. Angular vibrations in the 2-3 arc second range were easily observed on one of the beam lines, as was an overall mirror rotation in the arc second range.

Citation Download Citation

Shi-nan Qian, Harvey Rarback, Deming Shu, and Peter Z. Takacs "In-Situ Shearing Interferometry Of National Synchrotron Light Source Mirrors", Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); https://doi.org/10.1117/12.939838

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