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2 April 2010 Application of the cost-per-good-die metric for process design co-optimization
Tejas Jhaveri, Umut Arslan, Vyacheslav Rovner, Andrzej Strojwas, Larry Pileggi
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Proceedings Volume 7641, Design for Manufacturability through Design-Process Integration IV; 764104 (2010) https://doi.org/10.1117/12.846556
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States
Abstract
The semiconductor industry has pursued a rapid pace of technology scaling to achieve an exponential component cost reduction. Over the years the goal of technology scaling has been distilled down to two discrete targets. Process engineers focus on sustaining wafer costs, while manufacturing smaller dimensions whereas design engineers work towards creating newer IC designs that can feed the next generation of electronic products. In doing so, the impact of process choices made by manufacturing community on the design of ICs and vice-versa were conveniently ignored. Hoever, with the lack of cost effective lithography solutions at the forefront, the process and design communities are struggling to minimize IC die costs by following the described traditional scaling practices. In this paper we discuss a framework for quantifying the economic impact of design and process decisions on the overall product by comparing the cost-per-good-die. We discuss the intricacies involved in computing the cost-per-good-die as we make design and technology choices. We also discuss the impact of design and lithography choices for the 32nm and 22nm technology node. The results demonstrate a strong volume dependence on the optimum design style and corresponding lithography and strategy. Most importantly, using this framework process and design engineers can collaborate to define design style and lithography solutions that will lead to continued IC cost scaling.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Tejas Jhaveri, Umut Arslan, Vyacheslav Rovner, Andrzej Strojwas, and Larry Pileggi "Application of the cost-per-good-die metric for process design co-optimization", Proc. SPIE 7641, Design for Manufacturability through Design-Process Integration IV, 764104 (2 April 2010); https://doi.org/10.1117/12.846556
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KEYWORDS
Lithography
Manufacturing
Process engineering
Current controlled current source
Design for manufacturability
Semiconducting wafers
Semiconductors
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