Determination the optical constants of hafnium oxide film by Spectroscopic ellipsometry with various dispersion models

Weidong Gao; Yinhua Zhang; Hongxiang Liu

doi:10.1117/12.865979

13 October 2010 Determination the optical constants of hafnium oxide film by Spectroscopic ellipsometry with various dispersion models

Weidong Gao, Yinhua Zhang, Hongxiang Liu

Author Affiliations +

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76566T (2010) https://doi.org/10.1117/12.865979
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Optical constants of vacuum-deposited hafnium oxide film (HfO2) from infrared to ultraviolet spectral region (215nm-1700nm) have been determined by variable angle Spectroscopic ellipsometry with Cauchy dispersion model, Sellmeier dispersion model, Cauchy-Urbach dispersion model and Tauc-Lorentz dispersion model, respectively. The optical constants of the HfO2 film which were extracted with the four dispersion models have been compared. The surface roughness layer between HfO2 film and air and the interface layer between the film and the substrate have also been modeled with Bruggeman effective medium approximation (BEMA).

Citation Download Citation

Weidong Gao, Yinhua Zhang, and Hongxiang Liu "Determination the optical constants of hafnium oxide film by Spectroscopic ellipsometry with various dispersion models", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76566T (13 October 2010); https://doi.org/10.1117/12.865979

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