Development of multi-beam long trace profiler

Kiranmayee Kilaru; Daniel J. Merthe; Zulfiqar Ali; Mikhail V. Gubarev; Thomas Kester; Carl M. Benson; Wayne R. Mckinney; Peter Z. Takacs; Valeriy V. Yashchuk

doi:10.1117/12.895532

11 October 2011 Development of multi-beam long trace profiler

Kiranmayee Kilaru, Daniel J. Merthe, Zulfiqar Ali, Mikhail V. Gubarev, Thomas Kester, Carl M. Benson, Wayne R. Mckinney, Peter Z. Takacs, Valeriy V. Yashchuk

Author Affiliations +

Proceedings Volume 8147, Optics for EUV, X-Ray, and Gamma-Ray Astronomy V; 814719 (2011) https://doi.org/10.1117/12.895532
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

In order to fulfill the angular resolution requirements and make the performance goals for future NASA missions feasible, it is crucial to develop instruments capable of fast and precise figure metrology of x-ray optical elements for further correction of the surface errors. The Long Trace Profilometer (LTP) is an instrument widely used for measuring the surface figure of grazing incidence X-ray mirrors. In the case of replicated optics designed for x-ray astronomy applications, such as mirrors and the corresponding mandrels have a cylindrical shape and their tangential profile is parabolic or hyperbolic. Modern LTPs have sub-micro radian accuracy, but the measuring speed is very low, because the profilometer measures surface figure point by point using a single laser beam. The measurement rate can be significantly improved by replacing the single optical beam with multiple beams. The goal of this study is to demonstrate the viability of multi-beam metrology as a way of significantly improving the quality and affordability of replicated x-ray optics. The multi-beam LTP would allow one- and two-dimensional scanning with sub-micro radian resolution and a measurement rate of about ten times faster compared to the current LTP. The design details of the instrument's optical layout and the status of optical tests will be presented.

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Kiranmayee Kilaru, Daniel J. Merthe, Zulfiqar Ali, Mikhail V. Gubarev, Thomas Kester, Carl M. Benson, Wayne R. Mckinney, Peter Z. Takacs, and Valeriy V. Yashchuk "Development of multi-beam long trace profiler", Proc. SPIE 8147, Optics for EUV, X-Ray, and Gamma-Ray Astronomy V, 814719 (11 October 2011); https://doi.org/10.1117/12.895532

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