Precision manufacturing of fused silica glass by combining bound-abrasive polishing with ultrasonic vibration

Yaguo Li; Yongbo Wu; Jian Wang; Qiao Xu; Wei Yang; Yinbiao Guo

doi:10.1117/12.975135

16 October 2012 Precision manufacturing of fused silica glass by combining bound-abrasive polishing with ultrasonic vibration

Yaguo Li, Yongbo Wu, Jian Wang, Qiao Xu, Wei Yang, Yinbiao Guo

Author Affiliations +

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 841606 (2012) https://doi.org/10.1117/12.975135
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Ultrasonic vibration assisted machining with harder abrasives than the material to be machined can improve the quality of machined surface and manufacturing efficiency. Therefore, we integrated ultrasonic vibration (UV) into a recently developed technique chemo-mechanical bound-abrasive polishing in anticipation of further increasing the material removal rate (MRR) and/or surface roughness. The preliminary results indicate that ultrasonic vibration assisted chemo-mechanical bound-abrasive polishing can lead to increased material removal rate of manufactured optics while leaving the surface roughness comparable to conventional chemo-mechanical bound-abrasive polishing. The great MRR is attributed to the superiority of UV-assisted chemo-mechanical bound-abrasive polishing in discharging resultant swarf during machining.

Citation Download Citation

Yaguo Li, Yongbo Wu, Jian Wang, Qiao Xu, Wei Yang, and Yinbiao Guo "Precision manufacturing of fused silica glass by combining bound-abrasive polishing with ultrasonic vibration", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 841606 (16 October 2012); https://doi.org/10.1117/12.975135

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available