Hybrid polishing of fused silica glass with bound-abrasive polishers in conjunction with vibration

Yaguo Li; Yongbo Wu

doi:10.1117/12.928557

11 October 2012 Hybrid polishing of fused silica glass with bound-abrasive polishers in conjunction with vibration

Yaguo Li, Yongbo Wu

Proceedings Volume 8486, Current Developments in Lens Design and Optical Engineering XIII; 84860N (2012) https://doi.org/10.1117/12.928557
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

We incorporated ultrasonic vibration into recently developed fixed-abrasive pellets in an attempt to enhance MRR and/or to improve manufactured surface quality. A prototype ultrasonic vibrator, the heart of the polishing head, was designed and the related experimental work was performed on an in-house built setup in conjunction with the constructed head. The vibrator is devised for the generation of 2-D tool path despite using only one actuator in lieu of two actuators in conventional 2-D ultrasonic machining systems. We then combined the ultrasonic vibration with fixed abrasive polishing pellets to machine fused silica glass. Machining experiments reveal that MRR is considerably increased up to <50% upon the introduction of ultrasonic vibration (UV) whilst surface roughness is not degraded appreciably.

Citation Download Citation

Yaguo Li and Yongbo Wu "Hybrid polishing of fused silica glass with bound-abrasive polishers in conjunction with vibration", Proc. SPIE 8486, Current Developments in Lens Design and Optical Engineering XIII, 84860N (11 October 2012); https://doi.org/10.1117/12.928557

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