Femtosecond laser irradiation enhanced room temperature tin oxide nanostructure gas sensor

Haizhou Ren; Haibin Huo; Mengyan Shen; Marina Ruths; Hongwei Sun

doi:10.1117/12.2011952

19 April 2013 Femtosecond laser irradiation enhanced room temperature tin oxide nanostructure gas sensor

Haizhou Ren, Haibin Huo, Mengyan Shen, Marina Ruths, Hongwei Sun

Proceedings Volume 8692, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2013; 86923S (2013) https://doi.org/10.1117/12.2011952
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2013, San Diego, California, United States

Abstract

Tin oxide (SnO₂) thin film gas sensors that function at room temperature have been fabricated on nanostructured substrates. After femtosecond laser irradiation of the surface of the SnO₂, the sensitivity to gases, for example, carbon monoxide, increased noticeably. The dependence of the sensitivity on the number of laser pulses has been investigated. It is believed that the femtosecond laser pulses generate defects in a thin layer on the SnO₂ sensor surface. These defects may result in a potential energy well creating surface bound states for electrons to move on the surface, which increases the sensitivity to gases.

Citation Download Citation

Haizhou Ren, Haibin Huo, Mengyan Shen, Marina Ruths, and Hongwei Sun "Femtosecond laser irradiation enhanced room temperature tin oxide nanostructure gas sensor", Proc. SPIE 8692, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2013, 86923S (19 April 2013); https://doi.org/10.1117/12.2011952

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