CIGS thin film solar cell prepared by reactive co-sputtering

Jeha Kim; Ho-Sub Lee; Nae-Man Park

doi:10.1117/12.2021851

11 September 2013 CIGS thin film solar cell prepared by reactive co-sputtering

Jeha Kim, Ho-Sub Lee, Nae-Man Park

Proceedings Volume 8823, Thin Film Solar Technology V; 882303 (2013) https://doi.org/10.1117/12.2021851
Event: SPIE Solar Energy + Technology, 2013, San Diego, California, United States

Abstract

The reactive co-sputtering was developed as a new way of preparing high quality CuInGaSe₂(CIGS) films from two sets of targets; Cu_0.6Ga _0.4 and Cu_0.4In_0.6 alloy and Cu and (In_0.7Ga_0.3)₂Se₃ compound targets. During sputtering, Cu, In, Ga metallic elements as well as the compound materials were reacted to form CIGS simultaneously in highly reactive elemental Se atmosphere generated by a thermal cracker. CIGS layer had been grown on Mo/soda-lime glass(SLG) at 500°C. For both sets of targets, we controlled the composition of CIGS thin film by changing the RF power for target components. All the films showed a preferential (112) orientation as observed from X-ray diffraction analysis. The composition ratios of CIGS were easily set to 0.71-0.95, 0.10-0.30 for [Cu]/[III] and [Ga]/[III], respectively. The grain size and the surface roughness of a CIGS film increased as the [Cu]/[III] ratios increased. The solar cells were fabricated using a standard base line process in the device structure of grid/ITO/i-ZnO/CdS/CIGS/Mo/ SLG. The best performance was obtained the performance of V_oc = 0.45 V, J_sc =35.6, FF = 0.535, η = 8.6% with a 0.9 μm-CIGS solar cell from alloy targets while V_oc = 0.54 V, J_sc =30.8, FF = 0.509, η = 8.5% with a 0.8 μm-CIGS solar cell from Cu and (In_0.7Ga_0.3)₂Se₃.

Citation Download Citation

Jeha Kim, Ho-Sub Lee, and Nae-Man Park "CIGS thin film solar cell prepared by reactive co-sputtering", Proc. SPIE 8823, Thin Film Solar Technology V, 882303 (11 September 2013); https://doi.org/10.1117/12.2021851

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KEYWORDS

Copper indium gallium selenide

Selenium

Copper

Solar cells

Sputter deposition

Thin films

Gallium

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