Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms

Tyler Bell; Song Zhang

doi:10.1117/12.2035270

7 March 2014 Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms

Tyler Bell, Song Zhang

Proceedings Volume 8979, Emerging Digital Micromirror Device Based Systems and Applications VI; 897907 (2014) https://doi.org/10.1117/12.2035270
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

This paper summarizes our decade-long research efforts towards superfast 3D shape measurement leveraging the digital micromirror device (DMD) platforms. Specifically, we will present the following technologies: (1) high-resolution real-time 3D shape measurement technology that achieves 30 Hz simultaneous 3D shape acquisition, reconstruction and display with more than 300,000 points per frame; (2) Superfast 3D optical metrology technology that achieves 3D measurement at a rate of tens of kHz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and high-accuracy 3D optical metrology using the DMD platforms. This paper will present both principles and experimental results.

Citation Download Citation

Tyler Bell and Song Zhang "Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms", Proc. SPIE 8979, Emerging Digital Micromirror Device Based Systems and Applications VI, 897907 (7 March 2014); https://doi.org/10.1117/12.2035270

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