Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses

Young-Jin Kim; Minah Choi; Keunwoo Lee; Heesuk Jang; Jiyong Park; Seung-Woo Kim

doi:10.1117/12.2083260

19 February 2015 Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses

Young-Jin Kim, Minah Choi, Keunwoo Lee, Heesuk Jang, Jiyong Park, Seung-Woo Kim

Proceedings Volume 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014); 94493D (2015) https://doi.org/10.1117/12.2083260
Event: The International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference (icPOE 2014), 2014, Xi'an, China

Abstract

Fast, precise 3-D measurement of step-structures fabricated on microelectronic products is essential for quality assurance of semiconductor, flat panel display and photovoltaic products. Optical interferometers have long been used, but not that wide-spread for step-structures due to their phase ambiguity or low spatial coherence. Femtosecond pulse lasers can provide novel possibilities to optical profilometry both in the time and the frequency domain. In the time domain, step-surfaces can be measured over wide area by exploiting low temporal but high spatial coherence of femtosecond pulses; in the frequency domain, multi-wavelength interferometry permits the absolute measurement over the discontinued surface profiles while maintaining the sub-wavelength measurement precision.

Citation Download Citation

Young-Jin Kim, Minah Choi, Keunwoo Lee, Heesuk Jang, Jiyong Park, and Seung-Woo Kim "Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses", Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94493D (19 February 2015); https://doi.org/10.1117/12.2083260

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