Dual spectrally resolved interferometry to improve measurement range

Y. B. Seo; B. K. Kim; K.-N. Joo

doi:10.1117/12.2184123

22 June 2015 Dual spectrally resolved interferometry to improve measurement range

Y. B. Seo, B. K. Kim, K.-N. Joo

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 952507 (2015) https://doi.org/10.1117/12.2184123
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

In this investigation, a simple optical configuration and technique to improve the performance of spectrally-resolved interferometry (SRI) is proposed and experimentally verified. SRI has the fundamental limitation in the measurement range caused by the spectral bandwidth of an optical source and the spectral resolution of a spectrometer to detect the spectral interference density. Especially, the minimum measurable range of SRI is determined by the bandwidth of the source and this minimum measurable range becomes a dead zone in SRI. The proposed method can eliminate the dead zone without the minimum measurable distance and extend the measurable range of spectrally resolved interferometry (SRI) twice based on the bandwidth separation by a dichroic beam splitter (DBS). The benefit of this dichroic SRI is that it can be simply implemented with a DBS and another reference mirror from the typical SRI. Feasibility experiments were performed to verify the principle of the dichroic SRI and the result confirmed the effectiveness of this method as the extended measuring range.

Citation Download Citation

Y. B. Seo, B. K. Kim, and K.-N. Joo "Dual spectrally resolved interferometry to improve measurement range", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 952507 (22 June 2015); https://doi.org/10.1117/12.2184123

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