EUV or 193i: Who wins the center stage for 7nm node HVM in 2018?

Yoshinori Nagaoka; Junji Miyazaki

doi:10.1117/12.2208944

23 October 2015 EUV or 193i: Who wins the center stage for 7nm node HVM in 2018?

Yoshinori Nagaoka, Junji Miyazaki

Proceedings Volume 9635, Photomask Technology 2015; 963510 (2015) https://doi.org/10.1117/12.2208944
Event: SPIE Photomask Technology, 2015, Monterey, California, United States

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Yoshinori Nagaoka and Junji Miyazaki "EUV or 193i: Who wins the center stage for 7nm node HVM in 2018?", Proc. SPIE 9635, Photomask Technology 2015, 963510 (23 October 2015); https://doi.org/10.1117/12.2208944

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