Multi-channel optical gap sensor based on spectrally-resolved interferometry

Byeong Kwon Kim; Yong Bum Seo; Ki-Nam Joo

doi:10.1117/12.2183997

1 July 2015 Multi-channel optical gap sensor based on spectrally-resolved interferometry

Byeong Kwon Kim, Yong Bum Seo, Ki-Nam Joo

Proceedings Volume 9655, Fifth Asia-Pacific Optical Sensors Conference; 965502 (2015) https://doi.org/10.1117/12.2183997
Event: Fifth Asia Pacific Optical Sensors Conference, 2015, Jeju, Korea, Republic of

Abstract

In this investigation, we propose a multi-channel optical sensor to be used for precision industry to measure small gaps of a target or motion errors of a moving stage. The sensor consists of optical fiber components such as a CWDM and fiber probes for compactness, reliability and easy use. The operating principle of the sensor is based on the spectrally-resolved interferometry, where the spectral interferogram using a broadband light source is detected by a spectrometer. Each channel possesses its own spectrum as a result of spectral filtering of a CWDM and measures the distance independently. This optical sensor does not need any mechanical or electrical moving parts it can realize real-time measurements. In this presentation, we show the operating principle of the multi-channel optical gap sensor, its optical configuration and the experimental results.

Citation Download Citation

Byeong Kwon Kim, Yong Bum Seo, and Ki-Nam Joo "Multi-channel optical gap sensor based on spectrally-resolved interferometry", Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 965502 (1 July 2015); https://doi.org/10.1117/12.2183997

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
4 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Sensors

Distance measurement

Interferometry

Optical sensors

Spectroscopy

Coarse wavelength division multiplexing

Light sources

Show All Keywords

Keywords/Phrases

Search In:

Publication Years