Rapid fabrication of microdevices using laser direct writing and replica moulding technique

A. J. Antończak; B. D. Stępak; K. M. Abramski

doi:10.1117/12.2218531

4 March 2016 Rapid fabrication of microdevices using laser direct writing and replica moulding technique

A. J. Antończak, B. D. Stępak, K. M. Abramski

Proceedings Volume 9736, Laser-based Micro- and Nanoprocessing X; 973609 (2016) https://doi.org/10.1117/12.2218531
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

This paper presents a method that enables fast and low-cost fabrication of microchannels with oval cross-section. The procedure is based on formation of a concave meniscus at the interface between an initially cured PDMS and a polymeric mould fabricated using excimer laser. The replica is formed by expanding gas trapped within the structures of the mould during thermal curing. A second shaping factor is connected with surface phenomena at the interface between the mould, gas and partially cured PDMS. The final shape of the meniscus is determined when the PDMS reaches the high cure extent.

Citation Download Citation

A. J. Antończak, B. D. Stępak, and K. M. Abramski "Rapid fabrication of microdevices using laser direct writing and replica moulding technique", Proc. SPIE 9736, Laser-based Micro- and Nanoprocessing X, 973609 (4 March 2016); https://doi.org/10.1117/12.2218531

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available