Realization of highly rectifying Schottky barrier diodes and pn-heterojunctions on κ-Ga2O3 by pulsed laser deposition

Max Kneiss; Daniel Splith; Peter Schlupp; Anna Hassa; Holger von Wenckstern; Michael Lorenz; Marius Grundmann

doi:10.1117/12.2623450

5 March 2022 Realization of highly rectifying Schottky barrier diodes and pn-heterojunctions on κ-Ga₂O₃ by pulsed laser deposition

Max Kneiss, Daniel Splith, Peter Schlupp, Anna Hassa, Holger von Wenckstern, Michael Lorenz, Marius Grundmann

Author Affiliations +

Proceedings Volume PC12002, Oxide-based Materials and Devices XIII; PC120020I (2022) https://doi.org/10.1117/12.2623450
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We present κ-Ga2O3 layers grown by tin-assisted PLD on highly conductive Al-doped ZnO back contact layers. κ-Ga2O3 deposited on c-sapphire typically exhibits no lateral current flow. Significant currents can only be detected when a vertical current flow through the κ-Ga2O3 layer is enabled by the back contact confirming a strong conductivity anisotropy possibly due to suppressed transport across rotational domain boundaries. Pt/PtOx or Pd/PdOx Schottky contacts and NiO or ZnCo2O4 p-type contacts exhibit rectification ratios up to seven orders of magnitude. Further, we obtain a mean barrier height of ~2.1 eV and ideality factors as low as ~1.3 for Pt/PtOx/κ-Ga2O3 Schottky barrier diodes.

Conference Presentation

Citation Download Citation

Max Kneiss, Daniel Splith, Peter Schlupp, Anna Hassa, Holger von Wenckstern, Michael Lorenz, and Marius Grundmann "Realization of highly rectifying Schottky barrier diodes and pn-heterojunctions on κ-Ga₂O₃ by pulsed laser deposition", Proc. SPIE PC12002, Oxide-based Materials and Devices XIII, PC120020I (5 March 2022); https://doi.org/10.1117/12.2623450

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available