Interferometric phase-extraction algorithm insensitive to the refractive-index dispersion for the thickness profiling of a transparent plate

Jurim Jeon; Sungtae Kim; Yangjin Kim

doi:10.1117/12.2620156

20 May 2022 Interferometric phase-extraction algorithm insensitive to the refractive-index dispersion for the thickness profiling of a transparent plate

Jurim Jeon, Sungtae Kim, Yangjin Kim

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Proceedings Volume PC12137, Optics and Photonics for Advanced Dimensional Metrology II; PC121370C (2022) https://doi.org/10.1117/12.2620156
Event: SPIE Photonics Europe, 2022, Strasbourg, France

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Jurim Jeon, Sungtae Kim, and Yangjin Kim "Interferometric phase-extraction algorithm insensitive to the refractive-index dispersion for the thickness profiling of a transparent plate", Proc. SPIE PC12137, Optics and Photonics for Advanced Dimensional Metrology II, PC121370C (20 May 2022); https://doi.org/10.1117/12.2620156

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