Prof. Yangjin Kim Profile

Prof. Yangjin Kim

Associate Professor

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Author

Publications (16)

Proceedings Article | 10 August 2023 Poster

A novel phase extraction method based on deep learning for estimating geometric properties of optical flat

Jurim Jeon, Yangjin Kim

Proceedings Volume 12618, 126182C (2023) https://doi.org/10.1117/12.2673537

KEYWORDS: Deep learning, Geometrical optics, Flat optics, Phase shifts, Phase shifting, Education and training, Zernike polynomials, Image quality, Fizeau interferometers, Error analysis

Proceedings Article | 10 August 2023 Poster

Scanning Phase-Calculation Formula for Surface Profiling of Optical Flat using Fizeau Interferometer

Hwan Kim, Jurim Jeon, Juncheol Bae, Yangjin Kim

Proceedings Volume 12618, 1261828 (2023) https://doi.org/10.1117/12.2673356

KEYWORDS: Optical surfaces, Flat optics, Fizeau interferometers, Wavefront errors, Profiling, Phase interferometry, Wavefronts, Semiconductors, Visualization, Vibration

Proceedings Article | 10 August 2023 Poster

Development of Gaussian window for the surface profiling of silicon wafer in wavelength-scanning Fizeau interferometer

Juncheol Bae, Jurim Jeon, Hwan Kim, Juyoung Yun, Yangjin Kim

Proceedings Volume 12618, 126182B (2023) https://doi.org/10.1117/12.2673498

KEYWORDS: Windows, Silicon, Semiconducting wafers, Phase shifts, Fizeau interferometers, Profiling, Semiconductors, Phase shifting, Fourier transforms, Wavelength tuning

Proceedings Article | 20 May 2022 Poster

Simultaneous thickness and surface profiling of blank mask using harmonic phase-iterative method and wavelength-scanning interferometry

Sung Tae Kim, Yangjin Kim

Proceedings Volume PC12137, PC121370D (2022) https://doi.org/10.1117/12.2620188

KEYWORDS: Photomasks, Interferometry, Profiling, Inspection, Iterative methods, Fringe analysis, Algorithm development, Temperature metrology, Semiconductors, Semiconductor manufacturing

Proceedings Article | 20 May 2022 Poster

Interferometric phase-extraction algorithm insensitive to the refractive-index dispersion for the thickness profiling of a transparent plate

Jurim Jeon, Sungtae Kim, Yangjin Kim

Proceedings Volume PC12137, PC121370C (2022) https://doi.org/10.1117/12.2620156

KEYWORDS: Modulation, Interferometry, Profiling, Phase interferometry, Optical testing, Wavelength tuning, Interferometers, Fizeau interferometers, Signal detection, Semiconductors

Proceedings Article | 5 March 2022 Poster + Paper

Measurement of highly reflective surface compensating correlated error by sampling window

Jurim Jeon, Sungtae Kim, Yangjin Kim

Proceedings Volume 12008, 120080T (2022) https://doi.org/10.1117/12.2607582

KEYWORDS: Semiconducting wafers, Silicon, Algorithm development, Detection and tracking algorithms, Reflectivity, Visualization, Wavelength tuning, Modulation, Fizeau interferometers, Visibility

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Proceedings Article | 2 March 2020 Paper

Precision interferometric measurement of optical flat using wavelength tuning Fizeau interferometer

Yangjin Kim, Jiwon Seo, Sungtae Kim, Wonjun Bae, Mamoru Mitsuishi

Proceedings Volume 11287, 112871D (2020) https://doi.org/10.1117/12.2544324

KEYWORDS: Algorithm development, Phase shifts, Fizeau interferometers, Evolutionary algorithms, Wavelength tuning, Interferometry, Silica, Optical testing, Precision measurement, Interferometers

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Proceedings Article | 2 March 2020 Paper

Design of a phase-shifting algorithm for interferometric measurement of optical thickness variation

Wonjun Bae, Yangjin Kim

Proceedings Volume 11287, 112871I (2020) https://doi.org/10.1117/12.2554163

KEYWORDS: Phase shifts, Algorithm development, Error analysis, Interferometry, Fringe analysis, Optical testing, Reflectivity, Fourier transforms

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Proceedings Article | 26 April 2019 Paper

Interferometric precision measurement of highly reflective thin film using wavelength tuning Fizeau interferometry

Yangjin Kim, Kenichi Hibino, Mamoru Mitsuishi

Proceedings Volume 11032, 1103213 (2019) https://doi.org/10.1117/12.2521857

KEYWORDS: Thin films, Interferometry, Reflectivity, Phase shifting, Silica, Phase interferometry, Beam splitters, Phase shifts, Wavelength tuning, Fringe analysis

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Proceedings Article | 16 February 2018 Paper

Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer

Yangjin Kim, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 10519, 105191D (2018) https://doi.org/10.1117/12.2287641

KEYWORDS: Phase shifts, Wavelength tuning, Phase shifting, Fizeau interferometers, Algorithm development, Optical testing, Evolutionary algorithms, Ferroelectric materials, Mirrors, Algorithms

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Proceedings Article | 8 March 2016 Paper

Surface profile measurement of highly reflective silicon wafer using wavelength tuning interferometer

Yangjin Kim, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 9778, 97783L (2016) https://doi.org/10.1117/12.2229090

KEYWORDS: Phase shifts, Error analysis, Silicon, Semiconducting wafers, Fizeau interferometers, Reflectivity, Wavelength tuning, Interferometers, Fringe analysis, Interferometry, Algorithm development, Detection and tracking algorithms, Fourier transforms

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Proceedings Article | 18 August 2014 Paper

Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 9203, 92030Q (2014) https://doi.org/10.1117/12.2061476

KEYWORDS: Phase shifts, Algorithm development, Detection and tracking algorithms, Semiconductors, Reflectivity, Fourier transforms, Wavelength tuning, Fizeau interferometers, Photomasks, Lithography

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Proceedings Article | 1 May 2014 Paper

Measurement of the surface shape and optical thickness variation of a polishing crystal wafer by wavelength tuning interferometer

Yangjin Kim, Kenichi Hibino, Ryohei Hanayama, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 9132, 91320V (2014) https://doi.org/10.1117/12.2051193

KEYWORDS: Wafer-level optics, Semiconducting wafers, Surface finishing, Crystals, Polishing, Wavelength tuning, Phase shifts, Lithium niobate, Fizeau interferometers, Detection and tracking algorithms

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Proceedings Article | 2 April 2014 Paper

Design of the phase-shifting algorithm for flatness measurement of a mask blank glass

Yangjin Kim, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 9050, 90501W (2014) https://doi.org/10.1117/12.2045319

KEYWORDS: Phase shifts, Algorithm development, Photomasks, Glasses, Americium, Semiconductors, Quadrature amplitude modulation, Phase interferometry, Precision measurement, Extreme ultraviolet

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Proceedings Article | 13 May 2013 Paper

Excess fraction measurement of a transparent glass thickness in wavelength tuning interferometry

Yangjin Kim, Kenichi Hibino, Kanako Harada, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 8788, 878803 (2013) https://doi.org/10.1117/12.2020327

KEYWORDS: Refractive index, Interferometry, Glasses, Photomasks, Wavelength tuning, Phase shifts, Optical testing, Beam splitters, Fizeau interferometers, Semiconductors

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Proceedings Article | 11 August 2008 Paper

Measurement of absolute optical thickness distribution of a mask-glass by wavelength tuning interferometry

Kenichi Hibino, Kim Yangjin, Youichi Bitou, Sonko Ohsawa, Naohiko Sugita, Mamoru Mitsuishi

Proceedings Volume 7063, 70630S (2008) https://doi.org/10.1117/12.797594

KEYWORDS: Refractive index, Interferometry, Optical testing, Phase measurement, Glasses, Wavelength tuning, Fizeau interferometers, Interferometers, Beam splitters, Ferroelectric materials

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Showing 5 of 16 publications

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