DMD-based optical inspection system using UV laser structured illumination for wide-range and high-resolution imaging

Taerim Yoon; Pil Un Kim; Heesang Ahn; Kyujung Kim; Tae Joong Eom

doi:10.1117/12.2648990

17 March 2023 DMD-based optical inspection system using UV laser structured illumination for wide-range and high-resolution imaging

Taerim Yoon, Pil Un Kim, Heesang Ahn, Kyujung Kim, Tae Joong Eom

Author Affiliations +

Proceedings Volume PC12363, Multiscale Imaging and Spectroscopy IV; PC123630U (2023) https://doi.org/10.1117/12.2648990
Event: SPIE BiOS, 2023, San Francisco, California, United States

Abstract

We have developed a nanoscale strurctue measment system based on a digital micromirror device (DMD) based structured illumination microscopy (SIM) capable of wide-range and high-resolution imaging. The DMD based SIM yields the widefield images with the 20 different illumination patterns,a laser source with 349 nm wavelgnth, and a high sensitivity sCMOS camera the UV range. The developed image acquistion and reconstruct process can enhnace the imaging resolution under 150 nm and maximize the imaging area. In order to find practical applications of the SIM system, we prepared metallic nano pattern samples fabricated using FIB milling process and PET film samples fabricated using nano imprinting process that sample has nanohole structure with a diameter of 150 nm. The DMD based SIM system can reconstruct the nanostructure image with an large area and the obtained SIM images were compared with the SEM result to verify the improved resolution.

Conference Presentation

Citation Download Citation

Taerim Yoon, Pil Un Kim, Heesang Ahn, Kyujung Kim, and Tae Joong Eom "DMD-based optical inspection system using UV laser structured illumination for wide-range and high-resolution imaging", Proc. SPIE PC12363, Multiscale Imaging and Spectroscopy IV, PC123630U (17 March 2023); https://doi.org/10.1117/12.2648990

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KEYWORDS

Imaging systems

Ultraviolet radiation

Laser systems engineering

Optical inspection

Digital micromirror devices

Electron microscopes

Scanning electron microscopy

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