The unique behavior of quantum systems, such as coherence, superposition, and entanglement, can be harnessed to process, encode, and transmit information. Each quantum application (communication, computing, metrology, sensing, etc.) places its own set of requirements on the underpinning photonic technology, but many of these requirements are common to all the applications, and they form the basis for the implementation of future silicon quantum photonic integrated circuits (SiQuPICs). These common elements include single- or entangled-pair photon sources, passive optics to coherently mix photonic modes, active optics and delay lines to reconfigure those modes, high extinction ratio filters, and single-photon detectors. In this paper, we describe the design and fabrication of a basic SiQuPIC, comprising single-photon or entangled-photon-pair sources coupled to passive optical waveguides ending with single-photon detectors, all integrated on a single Si chip.
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