Development of ultra-precise low blaze angle gratings at ALS

Sooyeon Park; Dmitriy L. Voronov; Eric M. Gullikson; Fahard H. Salmassi; Howard A. Padmore

doi:10.1117/12.2678573

4 October 2023 Development of ultra-precise low blaze angle gratings at ALS

Sooyeon Park, Dmitriy L. Voronov, Eric M. Gullikson, Fahard H. Salmassi, Howard A. Padmore

Proceedings Volume PC12694, Advances in X-Ray/EUV Optics and Components XVIII; PC1269407 (2023) https://doi.org/10.1117/12.2678573
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

We developed a new process for low blaze angle (LBA) diffraction gratings for x-ray applications. The process provides a perfect shape of the saw-tooth grooves and preserves high precision of the optical surface of the grating substrate. An LBA grating is made by double-replication of a master blazed grating by nanoimprinting followed by a transfer of the polymer replica into a Si grating substrate by a plasma etch. The plasma etch process optimized for a certain etch rate ratio for the polymer and Si provides a reduction of the groove depth and the blaze angle down to 0.2 degrees. The reduction results in an improvement of surface roughness compared to the master grating and mitigate process non-uniformity owing to the scaling down effect. We investigate the quality and performance of the fabricated LBA gratings and evaluate process accuracy and reproducibility. This work was supported by the US Department of Energy under contract number DE-AC02-05CH11231.

Conference Presentation

Citation Download Citation

Sooyeon Park, Dmitriy L. Voronov, Eric M. Gullikson, Fahard H. Salmassi, and Howard A. Padmore "Development of ultra-precise low blaze angle gratings at ALS", Proc. SPIE PC12694, Advances in X-Ray/EUV Optics and Components XVIII, PC1269407 (4 October 2023); https://doi.org/10.1117/12.2678573

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