In-situ metrology of high heat load optics in SPring-8

Haruhiko Ohashi; Hirokatsu Yumoto; Takahisa Koyama; Yasunori Senba; Hiroshi Yamazaki; Koji Tsubota; Satsuki Shimizu; Takamitsu Saito; Hikaru Kishimoto; Masayuki Tanaka; Yasuhiro Shimizu; Takaihsa Matsuzaki; Takanori Miura

doi:10.1117/12.2682568

4 October 2023 In-situ metrology of high heat load optics in SPring-8

Haruhiko Ohashi, Hirokatsu Yumoto, Takahisa Koyama, Yasunori Senba, Hiroshi Yamazaki, Koji Tsubota, Satsuki Shimizu, Takamitsu Saito, Hikaru Kishimoto, Masayuki Tanaka, Yasuhiro Shimizu, Takaihsa Matsuzaki, Takanori Miura

Author Affiliations +

Proceedings Volume PC12695, Advances in Metrology for X-Ray and EUV Optics X; PC1269506 (2023) https://doi.org/10.1117/12.2682568
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

The incident power on the 1st optics at a standard undulator beamline of SPring-8 is typically 300W and reach up to 600 W at the maximum. Thermal distortion of the 1st optical elements such as crystals and mirrors affects the wavefront of the beam. For next-generation light sources such as SPring-8-II, proper cooling and element support to reduce distortion of optics is an even more important issue. Therefore we are developing an in-situ metrology to evaluate the deformation of optical surface under heat load. Combining in-situ measurements with simulations, new cooling system has been developed and introduced into beamlines. In this talk, we will introduce some examples of these methods.

Conference Presentation

Citation Download Citation

Haruhiko Ohashi, Hirokatsu Yumoto, Takahisa Koyama, Yasunori Senba, Hiroshi Yamazaki, Koji Tsubota, Satsuki Shimizu, Takamitsu Saito, Hikaru Kishimoto, Masayuki Tanaka, Yasuhiro Shimizu, Takaihsa Matsuzaki, and Takanori Miura "In-situ metrology of high heat load optics in SPring-8", Proc. SPIE PC12695, Advances in Metrology for X-Ray and EUV Optics X, PC1269506 (4 October 2023); https://doi.org/10.1117/12.2682568

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