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9 March 2024 Extended silicon photonics platform addressing bioimaging applications in the 1 µm wavelength range
Mathias Berciano, Gunay Yurtsever, Filippo Ferraro, Dieter Bode, Aliaksandra M. Ivinskaya, Kirill Zinoviev, Jeroen De Coster, Rafal Magdziak, Peter de Heyn, Maumita Chakrabarti, Joris Van Campenhout, Pol Van Dorpe
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Proceedings Volume PC12890, Smart Photonic and Optoelectronic Integrated Circuits 2024; PC128900B (2024) https://doi.org/10.1117/12.3003273
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
We demonstrate the co-integration of SiN waveguide-based building block components in an established 200 mm Silicon photonics platform, extending its capabilities to the 1 µm wavelength range, and addressing bioimaging applications based on Optical Coherence Tomography (OCT). Measured coupling and propagation loss, at wafer-scale, are low for edge couplers (< 2 dB), and PECVD SiN waveguides (< 0.4 dB/cm) respectively. SiN waveguide-coupled Ge-on-Si photodetectors with 0.6 A/W responsivity at 1060 nm and dark currents lower than 15 nA at -1 V operating voltage were achieved at wafer-scale, with a smaller footprint compared to standard Si-based photodetectors. This platform has the potential to be used for a variety of applications, such as optical communications, imaging, and sensing. The achieved results at 1060 nm pave the way for the deployment of miniaturized OCT-based devices to enable large scale patient diagnosis.
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Mathias Berciano, Gunay Yurtsever, Filippo Ferraro, Dieter Bode, Aliaksandra M. Ivinskaya, Kirill Zinoviev, Jeroen De Coster, Rafal Magdziak, Peter de Heyn, Maumita Chakrabarti, Joris Van Campenhout, and Pol Van Dorpe "Extended silicon photonics platform addressing bioimaging applications in the 1 µm wavelength range", Proc. SPIE PC12890, Smart Photonic and Optoelectronic Integrated Circuits 2024, PC128900B (9 March 2024); https://doi.org/10.1117/12.3003273
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KEYWORDS
Silicon photonics
Optical coherence tomography
Miniaturization
Waveguides
Photodetectors
Polarization
Optical imaging
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