Bullseye! Accurate integration of quantum dots and bullseye cavities

Craig R. Copeland; Adam L. Pintar; Ronald G. Dixson; Ashish Chanana; Kartik Srinivasan; Daron A. Westly; B. Robert Ilic; Marcelo I. Davanco; Samuel M. Stavis

doi:10.1117/12.2692245

12 March 2024 Bullseye! Accurate integration of quantum dots and bullseye cavities

Craig R. Copeland, Adam L. Pintar, Ronald G. Dixson, Ashish Chanana, Kartik Srinivasan, Daron A. Westly, B. Robert Ilic, Marcelo I. Davanco, Samuel M. Stavis

Author Affiliations +

Proceedings Volume PC12893, Photonic Instrumentation Engineering XI; PC128930A (2024) https://doi.org/10.1117/12.2692245
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

We introduce the traceable calibration of a cryogenic localization microscope, enabling accurate localization of quantum dots to improve subsequent integration into photonic cavities. We combine the calibration results with an assessment of fabrication accuracy by electron-beam lithography to introduce a comprehensive model of the effects of registration errors in the integration process on Purcell factor. Our theory shows the possibility of significantly improving the magnitude and distribution of Purcell factor across a wide field, enabling dramatic increases of process yield.

Conference Presentation

Citation Download Citation

Craig R. Copeland, Adam L. Pintar, Ronald G. Dixson, Ashish Chanana, Kartik Srinivasan, Daron A. Westly, B. Robert Ilic, Marcelo I. Davanco, and Samuel M. Stavis "Bullseye! Accurate integration of quantum dots and bullseye cavities", Proc. SPIE PC12893, Photonic Instrumentation Engineering XI, PC128930A (12 March 2024); https://doi.org/10.1117/12.2692245

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