Metrology

doi:10.1117/3.2525393.ch9

Metrology

Book: Principles of Lithography, Fourth Edition

Author(s): Harry J. Levinson

Published: 2019

https://doi.org/10.1117/3.2525393.ch9

Abstract

Measurement is required for developing lithographic processes and is fundamental to engineering and manufacturing control. The problem of accurate measurement is particularly significant for lithographers, where the extremely small features of state-of-the art processes have pushed measurement capabilities to their limits, and, some might say, beyond. Some of the metrology issues and challenges faced by lithographers are discussed in this chapter.