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This article [J. Micro/Nanolith. MEMS MOEMS 11(3), 033010 (2012)] was originally published online on 21 September 2012 with an error on page 6 in the Discussion section. A series of numbers was misprinted as (0, , , ) while the correct form is (0, , , ). All online versions of the article were corrected on 18 June 2013. |