Bioinspired low noise circular-shaped MEMS directional microphone

Asif Ishfaque; Ashiqur Rahaman; Byungki Kim

doi:10.1117/1.JMM.18.1.010501

5 February 2019 Bioinspired low noise circular-shaped MEMS directional microphone

Asif Ishfaque, Ashiqur Rahaman, Byungki Kim

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 18, Issue 1, 010501 (February 2019). https://doi.org/10.1117/1.JMM.18.1.010501

Abstract

The traditional state-of-the-art miniature directional microphones suffer from a higher noise level mainly due to size constraints. Herein, a miniature directional microphone mimicking the fly Ormia ochracea’s ear anatomy is presented with the prime focus on achieving higher signal-to-noise ratio at reduced size. The microphone has circular shape with aluminum nitride (AlN)-based piezoelectric readout scheme deposited at the center of the diaphragm. The 3-3 transduction mode is adopted for sensitivity enhancement. The microphone testing is performed in an anechoic chamber. Besides the bidirectional response, the A-weighted noise under broadband excitation is ∼29 dBA, which is lower than the optical directional microphone of Miles et al., which is the most prominent noise analysis work in the area of fly inspired MEMS directional microphone.

Citation Download Citation

Asif Ishfaque, Ashiqur Rahaman, and Byungki Kim "Bioinspired low noise circular-shaped MEMS directional microphone," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(1), 010501 (5 February 2019). https://doi.org/10.1117/1.JMM.18.1.010501

Received: 28 September 2018; Accepted: 17 January 2019; Published: 5 February 2019

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