Computer-aided alignment for a reference transmission sphere of an interferometer

Zhishan Gao; Lei Chen; Songzuan Zhou; Rihong Zhu

doi:10.1117/1.1629121

1 January 2004 Computer-aided alignment for a reference transmission sphere of an interferometer

Zhishan Gao, Lei Chen, Songzuan Zhou, Rihong Zhu

Optical Engineering, Vol. 43, Issue 1, (January 2004). https://doi.org/10.1117/1.1629121

A reference transmission sphere is an important device to measure the spherical surfaces, and it offers a high-quality spherical wave and a reference spherical surface with peak-to-valley less than λ/20 (λ=0.6328 μm). For this value, only the manual alignment is difficult to manage it. Thus, we study the computer-aided alignment (CAA), which can provide a guide to align the individual lens. We describe the following works concerning the CAA with no iteration for the transmission spheres: (1) by analysis of the relationship between the Zernike polynomial coefficients and the sensitive variables, for example, the air thickness error, the tilt, the decenter of the transmission sphere with an analysis program written in Zemax program language, only several Zernike coefficients that change linearly with these sensitive variables are chosen; (2) the magnitude and direction of the correction are found using the Moore-Penrose generalized inverse matrix; and (3) a numerical simulation and successful alignment are processed for a 4-in.-diam, f/5 transmission sphere.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Zhishan Gao, Lei Chen, Songzuan Zhou, and Rihong Zhu "Computer-aided alignment for a reference transmission sphere of an interferometer," Optical Engineering 43(1), (1 January 2004). https://doi.org/10.1117/1.1629121

Published: 1 January 2004

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