25 November 2021 HfO2/SiO2 nanolaminate-based composites prepared by ion beam sputtering for low-loss optics
Xinshang Niu, Hongfei Jiao, Bin Ma, Jinlong Zhang, Xinbin Cheng, Zhangshan Wang
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Abstract

HfO2 prepared by ion beam sputtering (IBS) is widely used as a high-refractive index material for making low-loss laser films. The challenge of a high-performance HfO2 film is to simultaneously obtain an amorphous morphology with low scattering and a stoichiometric structure with low absorption. Furthermore, nanometer-sized voids are commonly present in IBS films due to excessive oxygen and argon adsorption during deposition, which is the primary barrier to achieve a smooth surface and low optical loss of HfO2. Thin amorphous SiO2 layers were added periodically into HfO2 coatings using the IBS process to synthesize amorphous HfO2  /  SiO2 nanolaminate-based composites. The resulting composites exhibited excellent comprehensive performance with a dense amorphous microstructure and a void-free smooth surface. High-temperature annealing was performed to ensure superior stoichiometry and lower absorption. However, the crystalline states and microstructure of some composites evolved during the gradual annealing. We present a detailed study of the crystallization, surface topography, and absorption evolution in HfO2  /  SiO2 nanolaminates as a function of HfO2 sublayer thickness and thermal annealing temperature. Moreover, the interplay between crystallization, surface topography, and absorption is elucidated. The HfO2  /  SiO2 nanolaminate with 19 thin layers maintained a dense amorphous structure with low absorption after annealing. Finally, a 1064-nm HfO2  /  SiO2 nanolaminate-SiO2 high-performance reflector was prepared and achieved lower absorption with a smooth surface after annealing, which demonstrated the great potential of the HfO2  /  SiO2 nanolaminates for considerably improving optical loss.

© 2021 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2021/$28.00 © 2021 SPIE
Xinshang Niu, Hongfei Jiao, Bin Ma, Jinlong Zhang, Xinbin Cheng, and Zhangshan Wang "HfO2/SiO2 nanolaminate-based composites prepared by ion beam sputtering for low-loss optics," Optical Engineering 61(3), 031202 (25 November 2021). https://doi.org/10.1117/1.OE.61.3.031202
Received: 1 August 2021; Accepted: 13 September 2021; Published: 25 November 2021
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KEYWORDS
Hybrid fiber optics

Annealing

Absorption

Crystals

Optical coatings

Composites

Ion beams

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