We report the use of noncontact optical interferometric microscopy for surface topographic profiling. A Linnik optical configuration is used to create interferograms of an object’s surface. When the coherence condition between the two beams is met, the phase information of the object’s surface can be extracted to establish its topographic contour image. Using four |
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Interferograms
Optical surfaces
Optical interferometry
Profiling
Phase shifts
Profilometers
Mirror surfaces