Dr. Aloke Kanjilal Profile

Dr. Aloke Kanjilal

at Shiv Nadar Univ

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Publications (2)

Proceedings Article | 23 March 2012 Paper

Low energy electron bombardment induced surface contamination of Ru mirrors

A. Al-Ajlony, A. Kanjilal, M. Catalfano, S. Harilal, A. Hassanein, B. Rice

Proceedings Volume 8322, 832232 (2012) https://doi.org/10.1117/12.916114

KEYWORDS: Ruthenium, Mirrors, Carbon, Molecules, Extreme ultraviolet, Contamination, Reflectivity, Extreme ultraviolet lithography, Chemical species, Oxidation

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Proceedings Article | 23 March 2012 Paper

Mirror contamination and secondary electron effects during EUV reflectivity analysis

M. Catalfano, A. Kanjilal, A. Al-Ajlony, S. Harilal, A. Hassanein, B. Rice

Proceedings Volume 8322, 832233 (2012) https://doi.org/10.1117/12.916417

KEYWORDS: Ruthenium, Extreme ultraviolet, Mirrors, Reflectivity, Carbon, Selenium, Extreme ultraviolet lithography, Molecules, Contamination, Oxidation

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