We have investigated the uncertainty sources that affect the traceability of dimensional measurements using the VIScan
of the Zeiss F25 coordinate measuring machine (CMM). Our experimental results on line-width measurements are
promising, having a repeatability below 120 nm and moreover they are reproducible for all light settings investigated.
The comparison with the measurements performed on a facility used for line-scale calibrations provides very good
agreement. At present we can report an uncertainty below 0.45 μm for line-width calibrations. This would be the first
traceable F25 VIScan, and to our knowledge one of the first truly traceable vision systems for line-width calibrations.
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