Dr. Andreas Rosskopf Profile

Dr. Andreas Rosskopf

at Fraunhofer IISB

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper

3D mask simulation and lithographic imaging using physics-informed neural networks

V. Medvedev, A. Erdmann, A. Rosskopf

Proceedings Volume 12953, 129530N (2024) https://doi.org/10.1117/12.3010466

KEYWORDS: 3D mask effects, Lithography, Extreme ultraviolet, Education and training, Light sources and illumination, Diffraction, Computer simulations, Modeling, Near field, Waveguides, Deep learning, Computational lithography

Read Abstract +

SPIE Journal Paper | 16 November 2021 Open Access

Accurate prediction of EUV lithographic images and 3D mask effects using generative networks

Abdalaziz Awad, Philipp Brendel, Peter Evanschitzky, Dereje Woldeamanual, Andreas Rosskopf, Andreas Erdmann

JM3, Vol. 20, Issue 04, 043201, (November 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.4.043201

KEYWORDS: 3D modeling, Photomasks, 3D image processing, Extreme ultraviolet, Data modeling, Lithography, Extreme ultraviolet lithography, Process modeling, Computer programming, 3D acquisition

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 12 September 2021 Presentation

Accurate prediction of EUV lithographic images using data-efficient generative networks

Abdalaziz Awad, Philipp Brendel, Dereje Woldeamanual, Andreas Rosskopf, Andreas Erdmann

Proceedings Volume 11875, 118750I (2021) https://doi.org/10.1117/12.2597309

KEYWORDS: 3D modeling, Photomasks, Data modeling, Extreme ultraviolet, Lithography, 3D image processing, Extreme ultraviolet lithography, Image processing, Computer simulations, Machine learning

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years