Andrei Ushkov
PhD Student at Lab Hubert Curien
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 2 April 2020 Presentation + Paper
Proceedings Volume 11364, 1136415 (2020) https://doi.org/10.1117/12.2559292
KEYWORDS: Numerical simulations, Modulation, Diffraction gratings, Lithography, Plasmonics, Photoresist materials, Nanostructures, Moire patterns, Apodization

Proceedings Article | 19 September 2018 Paper
Andrei Ushkov, Maxime Bichotte, Isabelle Verrier, Thomas Kampfe, Yves Jourlin
Proceedings Volume 10775, 1077516 (2018) https://doi.org/10.1117/12.2323763
KEYWORDS: Photoresist materials, Lithography, Plasmonics, Photoresist developing, Metals, Diffraction gratings, Plasmons, Polarization, Nanolithography, Numerical simulations

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