Prof. Andrew Yick Profile

Prof. Andrew Yick

Graduate Student

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 17 October 2003 Paper

Andrew Yick, Jianzhao Li, Peter Herman

Proceedings Volume 4977, (2003) https://doi.org/10.1117/12.479538

KEYWORDS: Laser ablation, Photomasks, Fluorine, Silica, Etching, Glasses, Vacuum ultraviolet, Microscopes, Surface roughness, Pulsed laser operation

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Keywords/Phrases