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Andrey I. Ovodov
at MIET
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Publications (1)
Proceedings Article | 15 March 2019 Paper
Finite-element predictive 3D modelling and optimization of membrane-based thermoresistive MEMS accelerometers
N. Djuzhev, R. Lapshin, A. Belin, A. Ovodov, D. Novikov, G. Demin
Proceedings Volume 11022, 110220R (2019) https://doi.org/10.1117/12.2522515
KEYWORDS: Microelectromechanical systems, 3D modeling, Resistors, Thermal modeling, Optimization (mathematics), Sensors, Resistance, Thermal effects, Reliability, Atmospheric physics
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