Dr. Bo Peng Profile

Dr. Bo Peng

at Shanghai Institute of Optics and Fine Mechanics

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Publications (1)

Proceedings Article | 30 September 2011 Paper

Experimental determination of aberration in lithographic lens by aerial image

Lifeng Duan, Xiangzhao Wang, Guanyong Yan, Anatoly Bourov

Proceedings Volume 8169, 816909 (2011) https://doi.org/10.1117/12.896319

KEYWORDS: Lithography, Monochromatic aberrations, Sensors, Image sensors, Semiconducting wafers, Wavefront aberrations, Photomasks, Process modeling, Statistical analysis, Error analysis

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