Mr. Broc Stirton Profile

Broc Stirton

at Advanced Micro Devices Inc

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 22 March 2008 Paper

Extracting dose and focus from critical dimension data: optimizing the inverse solution

Kevin Lensing, J. Broc Stirton, Siddharth Chauhan

Proceedings Volume 6922, 692209 (2008) https://doi.org/10.1117/12.775441

KEYWORDS: Data modeling, Lithography, Numerical analysis, Semiconducting wafers, Metrology, Testing and analysis, Critical dimension metrology, Finite element methods, Process control, Reticles

Read Abstract +

Proceedings Article | 10 May 2005 Paper

A comprehensive comparison of spectral scatterometry hardware

Kevin Lensing, Broc Stirton, Brian Starnes, Joseph Synoradzki, Bryan Swain, Lawrence Lane

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.600783

KEYWORDS: Critical dimension metrology, Scatterometry, Reflectance spectroscopy, Reflectometry, Metrology, Spectroscopy, Reflectivity, Logic, Data modeling, Lithography

Read Abstract +

Proceedings Article | 15 July 2003 Paper

LithoCell-integrated critical dimension metrology

J. Stirton, Clinton Miller, Anita Viswanathan, Makoto Miyagi, Lawrence Lane, Michael Laughery, Tarun Parikh, Kin Chung Chan, Apo Sezginer

Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485241

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Metrology, Particles, Time metrology, Control systems, Metals, Scanning electron microscopy, Tin, Process control

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years