Dr. Cari F. Herrmann Profile

Dr. Cari F. Herrmann

Research Associate at Univ of Colorado Boulder

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Publications (2)

Proceedings Article | 22 January 2005 Paper

Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54-Å wavelength

Marie Tripp, Francois Fabreguette, Cari Herrmann, Steven George, Victor Bright

Proceedings Volume 5720, (2005) https://doi.org/10.1117/12.590429

KEYWORDS: Atomic layer deposition, Coating, Micromirrors, Mirrors, Multilayers, Aluminum, Reflectivity, Microelectromechanical systems, Silicon, X-rays

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Proceedings Article | 22 January 2005 Paper

Properties of atomic-layer-deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS

Cari Herrmann, Frank DelRio, Steven George, Victor Bright

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.589322

KEYWORDS: Atomic layer deposition, Aluminum, Zinc oxide, Dielectrics, Zinc, Microelectromechanical systems, Capacitance, Mercury, Switches, Spectroscopy

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