Dr. Changzhi Shi Profile

Dr. Changzhi Shi

at Shanghai Institute of Technical Physics of the CAS

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Publications (2)

Proceedings Article | 16 May 2017 Paper

Microstructure characterization of lattice defects induced by As ion implantation in HgCdTe epilayers

Changzhi Shi, Chun Lin, Yanfeng Wei, Lu Chen

Proceedings Volume 10177, 101771C (2017) https://doi.org/10.1117/12.2262915

KEYWORDS: Ion implantation, Mercury cadmium telluride, Arsenic, Annealing, Liquid phase epitaxy, Ions, Temperature metrology, Molecular beam epitaxy, Transmission electron microscopy, X-ray diffraction

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Proceedings Article | 20 May 2016 Paper

Influences of thicknesses and structures of barrier cap layers on As ion profiles and implant damages in HgCdTe epilayers

Changzhi Shi, Chun Lin, Yanfeng Wei, Lu Chen, Zhenhua Ye

Proceedings Volume 9819, 981923 (2016) https://doi.org/10.1117/12.2224943

KEYWORDS: Mercury cadmium telluride, Arsenic, Ion implantation, Annealing, Liquid phase epitaxy, Diffusion, Ions, Zinc, Transmission electron microscopy, Electron beams

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