The oldest and most proven technique for fabricating diffraction gratings is mechanical ruling, which has been used for mass market manufacturing since the early 1960’s. In this talk I will give the latest update on Inprentus’ use of contact‐mode lithography for fabricating aperiodic grating‐coupled waveguides for AR. I will show data demonstrating 20‐picometer pitch uniformity, low stray light levels, aperiodic modulation results, and successful replication in a high‐index (n=1.9) resin using commercially available nanoimprint lithography.
AR architectures based on TIR waveguides require surface diffraction gratings to couple light in and out. Traditionally, the spectral response of a grating is tuned by blazing, i.e., creating faceted grooves with precise angles. However, blazed facets are difficult to achieve using resist-based techniques such as e-beam lithography. In this talk I will describe a new approach to making blazed AR grating masters by mechanical ruling, in which grooves are created by deforming a metallic surface with a diamond stylus.
We introduce a method for using Fizeau interferometry to measure the intrinsic resolving power of a diffraction grating. This method is more accurate than traditional techniques based on a long-trace profiler (LTP), since it is sensitive to long-distance phase errors not revealed by a d-spacing map. We demonstrate 50,400 resolving power for a mechanically ruled XUV grating from Inprentus, Inc.
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