CONFERENCE PROCEEDINGS
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Dr. Daniel D. Shin
at Northrop Grumman Corp
SPIE Involvement:
Author
Publications (5)
Proceedings Article | 5 May 2005 Paper
Miniature thin-film NiTi hydraulic actuator with MEMS microvalves
Proceedings Volume 5762, (2005) https://doi.org/10.1117/12.607307
KEYWORDS: Actuators, Thin films, Microelectromechanical systems, Silicon, Shape memory alloys, Etching, Manufacturing, Silicon films, Electronics, Nanolithography
Proceedings Article | 14 August 2003 Paper
Compact hybrid actuator device (CHAD) for ultracompact navigation, guidance, and control
Proceedings Volume 5054, (2003) https://doi.org/10.1117/12.483889
KEYWORDS: Actuators, Shape memory alloys, Thin films, Electronics, Minerals, Control systems, Liquids, Temperature metrology, Silicon films, Navigation systems
Proceedings Article | 14 August 2003 Paper
Miniature actuator using thin-film shape-memory alloy
Proceedings Volume 5054, (2003) https://doi.org/10.1117/12.483732
KEYWORDS: Actuators, Shape memory alloys, Thin films, Liquids, Thin film devices, Head, Prototyping, Silicon, Silicon films, Nitrogen
Proceedings Article | 22 July 2003 Paper
Microvalve for SMA-based CHAD
Proceedings Volume 5055, (2003) https://doi.org/10.1117/12.483593
KEYWORDS: Nickel, Shape memory alloys, Silicon, Actuators, Finite element methods, Microelectromechanical systems, Deep reactive ion etching, Etching, Photoresist materials, Failure analysis
Proceedings Article | 15 July 2002 Paper
Development of a SMA-based actuator for compact kinetic energy missile
Proceedings Volume 4701, (2002) https://doi.org/10.1117/12.474662
KEYWORDS: Actuators, Shape memory alloys, Thin films, Missiles, Liquids, CFD analysis, Prototyping, Smart materials, Water, Data modeling
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