Dr. David Kuhness Profile

Dr. David Kuhness

at JOANNEUM RESEARCH Forschungsgesellschaft mbH

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Publications (1)

Proceedings Article | 18 June 2024 Presentation + Paper

Comprehensive evaluation of grayscale laser lithography build accuracy via benchmark artefacts

Adrian H. Lutey, Dušan Chorvát, David Kuhness, Daniel Haško, Christine Schuster, Anja Voigt, Vincenzo Ferraro, Seyyedhossein Mckee, Annamaria Cucinotta, Ladislav Kuna

Proceedings Volume 12995, 1299505 (2024) https://doi.org/10.1117/12.3022351

KEYWORDS: Lithography, Grayscale lithography, Performance modeling, Photoresist materials, 3D modeling, Data modeling, Optical lithography, Light emitting diodes, Confocal microscopy, Algorithm development

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