Mr. David Nessim Profile

David Nessim

at Intel Electronics Ltd

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Publications (1)

SPIE Journal Paper | 27 January 2022

Development and evaluation of three-dimensional metrology of nanopatterns using electron microscopy

Neta Shomrat, Konstantin Chirko, Inbal Weisbord, Yan Avniel, Sergey Khristo, David Nessim, Alon Litman, Tamar Segal-Peretz

JM3, Vol. 21, Issue 02, 021202, (January 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021202

KEYWORDS: 3D metrology, Scanning electron microscopy, Scanning transmission electron microscopy, Tomography, Line edge roughness, Sensors, 3D image processing, Metrology, Calibration, Transmission electron microscopy

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