Dr. Dipak Paramanik Profile

Dr. Dipak Paramanik

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Area of Expertise:

Etch , Semiconductor , photovoltaic , Plasma , thinfilm , solar

Publications (1)

Proceedings Article | 8 May 2012 Paper

Optimization and shape control of GaN nanopillars fabricated by inductively coupled plasma etching

Dipak Paramanik, Abhishek Motayed, Geetha Aluri, Sergiy Krylyuk, Albert Davydov, Matthew King, Sean McLaughlin, Shalini Gupta, Harlan Cramer, Babak Nikoobakht

Proceedings Volume 8373, 83732V (2012) https://doi.org/10.1117/12.920836

KEYWORDS: Etching, Gallium nitride, Nanolithography, Ions, Photomasks, Plasma etching, Chemistry, Nanostructures, Plasma, Anisotropy

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