Dr. Dirk Isfort Profile

Dr. Dirk Isfort

at Carl Zeiss Jena GmbH

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 1 May 2014 Paper

Optimization of the spectral performance of multilayer coatings on complex optics in plasma assisted deposition processes

D. Isfort, Diana Tonova, M. Sundermann, Thomas Koch

Proceedings Volume 9131, 913109 (2014) https://doi.org/10.1117/12.2054625

KEYWORDS: Optical coatings, Refractive index, Ions, Multilayers, Plasma, Silica, Thin film coatings, Data modeling, Sputter deposition, Titanium dioxide

Read Abstract +

The performance of optical components is usually improved by optical coatings. Some of these optical components exhibit complex geometrical shapes and are therefore very difficult to coat in a homogeneous way. The spectral performance of the optical coatings on such substrates will vary as a function of its geometry making it very difficult to keep the spectral performance within customer specifications all over the substrate. Examples for optics with complex geometries are half sphere lenses, freeform surfaces, diffraction gratings, microlense arrays, large substrates etc. We developed a simulation tool that can calculate and optimize the spectral performance of a given multilayer stack on arbitrarily shaped optics as a function of the processing parameters of the coating plant. This tool will obviously reduce the risk and the development costs. The spectral performance of a multilayer stack is given in general by the coating design, that means by the individual layer thicknesses and the refractive indices of the different layer materials. On curved optics different coating materials exhibit different thickness and refractive index distributions. Consequently the optical layer stack will exhibit varying spectral performance at different positions on the substrate. Empirical models for thickness and refractive index distributions have been developed as a function of the most important processing parameters (e.g., deposition rate, deposition angle, ion impingement rate and temperature).

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years