Dr. Fabio Ferri Profile

Dr. Fabio Ferri

Senior Process & Equipment Engineer at LFoundry Avezzano s.r.l.

SPIE Involvement:

Author

Area of Expertise:

Lithography Process

Publications (1)

Proceedings Article | 20 March 2012 Paper

KrF resists for implant layers patterning extreme high-aspect ratio structures with a double focal plane exposure technique

Giorgio Rafaelli, Fabio Ferri, Stefano Volpi, Chisun Hong

Proceedings Volume 8325, 83252D (2012) https://doi.org/10.1117/12.918015

KEYWORDS: Optical lithography, Scanning electron microscopy, Transparency, Photoresist processing, Image sensors, Diffusion, Photoresist materials, Charge-coupled devices, CMOS sensors, Semiconducting wafers

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