Prof. Grace H. Ho Profile

Prof. Grace H. Ho

Professor at National Univ of Kaohsiung

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Author

Publications (3)

Proceedings Article | 23 March 2010 Paper

Absorption and loss of film thickness in photoresists and underlayer materials upon irradiation at 13.5 nm

Grace Ho, Fu-H. Kang, Huang-W. Fu, Yu-H. Shih, Hok-S. Fung, Wan-P. Ku, Yu-S. Cheng, Pei-J. Wu

Proceedings Volume 7636, 76362U (2010) https://doi.org/10.1117/12.851280

KEYWORDS: Polymethylmethacrylate, Reflectivity, Extreme ultraviolet, Thin films, Photoresist materials, Extreme ultraviolet lithography, Optical properties, Refractive index, Absorption, Reflectometry

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Proceedings Article | 22 August 2001 Paper

Lens heating-induced focus drift of I-line step and scan: correction and control in a manufacturing environment

Grace Ho, Anthony Cheng, Chung-Jen Chen, C. Fang, Meng Li, I-Chung Chang, P. Chu, Y. Chu, K. Shu, C. Huang, H. Yeh, H. Shiao, Ho Lan

Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436722

KEYWORDS: Semiconducting wafers, Manufacturing, Reticles, Metals, Control systems, Reflectivity, Photoresist materials, Visualization, Optical lithography, Image quality

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Proceedings Article | 15 February 1994 Paper

Element-specific magnetic hysteresis measurements: a new application of circularly polarized soft x rays

Hong-Ji Lin, Chien Chen, George Meigs, Yves Idzerda, Alison Chaiken, Gary Prinz, Grace Ho

Proceedings Volume 2010, (1994) https://doi.org/10.1117/12.168578

KEYWORDS: Magnetism, Iron, Cobalt, Dichroic materials, Luminescence, X-rays, Ultraviolet radiation, Absorption, 3D metrology, Chemical species

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