Dr. Guillaume Freychet
Beamline Scientist at CEA
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 1295535 (2024) https://doi.org/10.1117/12.3010744
KEYWORDS: Overlay metrology, Scanning electron microscopy, Contour extraction, Scanning transmission electron microscopy, Semiconducting wafers, Scattering, X-rays, Silicon, Image restoration, Critical dimension metrology

SPIE Journal Paper | 8 March 2024
Timothée Choisnet, Abdelali Hammouti, Vincent Gagneur, Jérôme Reche, Guido Rademaker, Guillaume Freychet, Guillaume Jullien, Julien Ducoté, Patrice Gergaud, Delphine Le Cunff
JM3, Vol. 23, Issue 01, 014002, (March 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.014002
KEYWORDS: Critical dimension metrology, Transmission electron microscopy, Cadmium, X-rays, Synchrotrons, Silicon, Semiconducting wafers, Lithography, Scanning electron microscopy, Chromium

SPIE Journal Paper | 24 June 2023
JM3, Vol. 22, Issue 03, 031210, (June 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031210
KEYWORDS: X-rays, X-ray sources, Scattering, Grazing incidence, Silicon, Reflection, Laser scattering, Atomic force microscopy, X-ray microscopy, X-ray technology

Proceedings Article | 27 April 2023 Presentation + Paper
Timothée Choisnet, Abdelali Hammouti, Vincent Gagneur, Jérôme Reche, Guido Rademaker, Guillaume Freychet, Guillaume Jullien, Julien Ducote, Patrice Gergaud, Delphine Le Cunff
Proceedings Volume 12496, 124961K (2023) https://doi.org/10.1117/12.2657661
KEYWORDS: Transmission electron microscopy, Synchrotrons, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers, Cadmium, X-rays, Scattering, Lithography, Silicon

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124961L (2023) https://doi.org/10.1117/12.2657500
KEYWORDS: X-rays, Scattering, X-ray sources, Grazing incidence, Silicon, Reflection, Metrology, Atomic force microscopy, Genetic algorithms, Signal intensity

Showing 5 of 18 publications
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