Mr. Hae Nam Jeong Profile

Hae Nam Jeong

at Hanyang Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 26 October 2017 Paper

Hae-Nam Jeong, Guk-Jin Kim, Sung-Gyu Lee, Hye-Keun Oh

Proceedings Volume 10450, 104501Q (2017) https://doi.org/10.1117/12.2281036

KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon carbide, Finite element methods, Graphene

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Keywords/Phrases