Ms. Haena Lee Profile

Haena Lee

at S&S Tech Co. Ltd.

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Publications (1)

Proceedings Article | 11 November 2022 Presentation

Full size EUV pellicle development for high power

Juhee Hong, Haena Lee, Yesong Kim, Donghoi Kim, Munsu Choi, Seungjo Lee, Byeong Sung Yu, Chulkyun Park, Min Wook Jung, Chang Hoon Lee, Byoung Hoon Seung, Cheol Shin

Proceedings Volume PC12292, PC122920E (2022) https://doi.org/10.1117/12.2641755

KEYWORDS: Pellicles, Extreme ultraviolet lithography, Extreme ultraviolet, Transmittance, Yield improvement, Spectroscopy, Semiconductors, Semiconducting wafers, Photomasks, Particles

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